The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing - Journal of Materials Chemistry (RSC Publishing)
A schematic overview of the (a) Atomic Layer Deposition (ALD) and (b)... | Download Scientific Diagram
Catalysts | Free Full-Text | Atomic Layer Deposition for Preparation of Highly Efficient Catalysts for Dry Reforming of Methane | HTML
New development of atomic layer deposition: processes, methods and applications. - Abstract - Europe PMC
A brief review of atomic layer deposition: from fundamentals to applications - ScienceDirect
Atomic Layer Deposition - Plasma Electronic
Thermal atomic layer deposition of metallic Ru using H2O as a reactant - ScienceDirect
Atomic Layer Deposition in Nanopores | InRedox
Atomic Layer Deposition - an overview | ScienceDirect Topics